Products & Services > DiMic Topography
Digital Optical Microscopy Systems
DiMic Topography
Non-Contact Depth Measuring Microscope System
DT2
- Specially designed focus indicator (Target Mark) facilitates focusing operation greatly
- Highly accurate and repeatable measurement is possible
- No discrepancies between operators occur
Features
Principle of measurement
This microscope system offers a precise focus indicator consisting of an index graticule (Target Mark) and a beam splitting prism built into reflecting illumination optical system of microscope. And it has been designed based on the optical principle that at just focus status, of which the upper and lower halves coincide, can be observed above the focused image of a specimen, and that when defocused even slightly, the index line is split into two lines in the upper and lower halves of the graticule.
Method of measurement
An exact focal point is secured by confirming that the vertical index lines in the upper and lower halves of the graticule coincide with both of straight lines exactly, rather than by making judgements as to whether image of a specimen surface is blurred or not.Since this is a unique system that is neither affected by the focal depth of objective lenses nor dependent on the ability of the human eyes to discriminate two points, a focal point can be determined very accurately as compared with other focusing systems. This focusing system and the digital gauge allow non-contact, high precision measurements of step heights between surfaces.
Advantages
- As a focal point is detected under the non-contact optical method, measurements can be taken without being affected by physical damages to a specimen such as distortion, blow or nicks, etc. (Refer to Diagram 1)
- Since the precise focus indicator based on the "split-target" method has been adopted, highly-accurate depth measurements can be taken simply by coinciding the two halves of the graticule.
- As the operation is so simple, this is the most suitable measuring microscope system for various kinds of applications.
- While observing minute surface condition of a point of measurement, the positional relation between a reference point of measurement and a point of measurement can be confirmed, and measurements can be also taken in the same field of view. (Refer to Diagram 2)
- Measurement accuracy can be improved through the use of high magnification objective lenses. (Refer to Diagram 3)
- Either Black-stripe or White-stripe Target Mark can be chosen as per a condition of specimen surface. Since three kinds of Target Mark status (black-stripe, while-stripe and nothing) can be selected by a lever, the photographs can be taken without the Target Mark if necessary.
- Various models can be configured by the combination of different equipment such as viewing head, measuring stage and other optional items, depending on applications of respective users. (Refer to System Diagram)
- Incorporating DT2’s optical system, the NEW PRODUCT - DTM - was developed as a smaller and lighter microscope unit having excellent cost-effectiveness, exclusively designed to be integrated into production line or equipment.
- High-precision non-contact depth measurement and Nomarski DIC (Differential Interference Contrast) observation method are available by an another version of this microscope system (DT2N). (Refer to Diagram 4)
- In case of observing transparent, mirror or pearskin finish surfaces with a laser system, focus errors are apt to occur due to diffuse reflection. While, Target Mark can be projected onto such surfaces in case of our optical system, step heights of such specimen surfaces can be measured.
Specification
| DT2 | DTM | |||
| Microscope Stand & Bracket |
Travel | Coarse Adjustable | 140mm | - |
| Fine Adjustable | 25mm | 25mm | ||
| Height of specimen | 150mm(max.) using 505S stage | - | ||
| Illuminator | Reflecting | Illumination with Index Graticule Tungsten Lamp (8V, 15W) | Illumination with Index Graticule Halogen Lamp (8V, 150W) | |
| Transmitted | Telecentric illumination Halogen Lamp (6V, 20W) | - | ||
| Z-axis measuring | 1µm Reading, 25mm Travel (ID-F125) 1µm Reading, 10mm Travel (LGB-110S) 0.1µm Reading, 25mm Travel (LGF-0110L) |
1 µm Reading, 25mm Travel (ID-F125) 0.1 µm Reading, 25mm Travel (LGF-0110L) |
||
| Z-axis measuring Accuracy |
3σ=1µm (using 40x Objective) | 3σ=1µm (using 40x Objective) | ||
| Viewing Head |
Erected Binocular | Monocular with TV C-mount Tube | Observation is only for CCD camera | |
| Erected Trinocular | Binocular with TV C-mount Tube | |||
| Objective | PLM10X | N.A. 0.20, W.D. 12.0mm | ||
| Eyepiece NWF10X | NWF10X | Field Number Ø16mm with Offset Hair Line Crossed Reticle |
- | |
| Measuring Stage | 505S (*) | 505L | 510 | 510D | 100D | |
| Space of Specimens | Ø118mm | Ø170mm | 280x190mm | 280x190mm | Ø206mm | |
| Size of Stage Glass | Ø100mm | Ø100mm | 170x120mm | 170x120mm | Ø179mm | |
| Travel (X-Y) | 50x50mm | 50x50mm | 100x50mm | 100x50mm (with Linear Scale) |
100x100mm (with Linear Scale) |
|
| Measuring Accuracy | X: (4+0.02L)µm, Y: (4+0.02L)µm, L: Travel Distance (mm) | |||||
| Rotational Angle | 360° | 360° | - (**) | - (**) | 360° | |
| 150x150x 45mm |
205x205x 90mm |
285x205x 95mm |
285x205x 95mm |
244x244x 83mm |
||
(*) Stage plate is required. (**) Rotary table (510RS) is available.