Double View Mask Aligner

MPEM-1600	MPEM-12M	MPEM-16M
(applicable to wafers up to 4 inches in diameter)	(applicable to wafers up to 6 inches in diameter)	(applicable to wafers up to 8 inches in diameter)

The MPEM series is a high precision double-view mask aligner including alignment optical systems on the top and bottom sides of a wafer, so that contact, soft-contact, and proximity patterning can be performed to the top side surface, in alignment with the pattern on the bottom side of the wafer. The accurate alignment of the mask and wafer was made possibly by the high- resolution optical system with the symmetrically arranged 10X objective lenses installed on the top and bottom sides. As the separation between the paired objective lenses can be adjusted, irregularly formed wafers can also be aligned freely.

* Besides the above, Motorized type MPEM-2000/4000 and Full Auto type MPEM-8M/12M are available.

Specification

		MPEM-1600	MPEM-12M	MPEM-16M
Photomask size		5-inches maximum	7-inches maximum	9-inches maximum
Wafer size		up to 4-inches (Amorphous)	up to 6-inches (Amorphous)	up to 8-inches (Amorphous)
Mask holder sliding		Manual chuck
Mask movement		X=±3 mm, Y=±3 mm
Exposure	Method	Soft contact / Hard contact / Proximity exposures
	Illumination	250W ultra-high-pressure vapor mercury lamp	500W ultra-high-pressure vapor mercury lamp
	Illumination irregularity	±5%
	Effective exposure area	Ø 100 mm in diamete	Ø 150 mm in diamete	Ø 200 mm in diamete
	Resolution	3mµ L/S
Alignment	Method	Viewing by eyepieces (Sprit field system)		9-inch TV monitor system
	Objective lenses	10X two pairs (upper/lower)
	Eyepieces	NWF 10X (one pair)		-
	Total magnification	100X		200X
	Objective lens separation	15 ~ 90 mm	80 ~ 140 mm	55 ~ 184 mm
	Focusing units	Manual
	Alignment range	X, Y = ±4mm θ = ±22.5°	X, Y = ±4mm θ = ±5°
	Alignment gap	09 ~ 99µm
	Alignment accuracy	less than ±5mm
Utilities	Power supply for main unit	100-220V AC, 50/60Hz, 15A (600W)
	Power supply for mercury lamp	100-220V AC, 50/60Hz, 15A (550W)	100-220V AC, 50/60Hz, 15A (1,100W)
	N2 gas	0.4 ~ 0.5 Mpa	100-220V AC, 50/60Hz, 15A (1,100W)
	Vacuum pressure	less than 21.3kPa (-80kPa from atmospheric pressure)
Dimensions (main unit)		750(W)x 820(D)x 1,700(H)mm	940(W)x 860(D)x 1,670(H)mm	1,200(W)x 1,090(D)x 1,800(H)mm
Net weight		approx. 450 kg	approx. 550 kg	approx. 700 kg
Options		NWF 15X eyepieces (one pair) 9-inch TV monitor system (black and white)		-