Non-Contact · Contact Aligner

MSMA-1200M

Applicable to wafers up to 6 inches in diameter

"For Research and Development, Multiproduct Production Field"

"Cutting Edge of Technology"

Adoption of fully non-contact calibration system.
* No damage to mask and wafer in calibration.
* Significant improvement in gap accuracy.
Interactive operation on PC monitor is adopted. High precision alignment based on "assist lines" is possible.

SMA-600M is a manual mask aligner for R&D and multiproduct production field, which adopts a clear optical system and fully non-contact calibration unit. The exposure up to φ150mm wafer is capable by contact or proximity mode. It is the most suitable system in exposure process for various kinds of electronic devices such compound semiconductors as LD, LED, and manufacturing process for micromachines including pressure sensor and the like.